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dc.contributor.authorShaver, David Carl.en_US
dc.contributor.otherMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.en_US
dc.date.accessioned2024-05-14T23:17:42Z
dc.date.available2024-05-14T23:17:42Z
dc.date.copyright1981en_US
dc.date.issued1981en_US
dc.identifier.urihttps://hdl.handle.net/1721.1/154969
dc.descriptionThesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 1981en_US
dc.descriptionIncludes bibliographical references.en_US
dc.description.statementofresponsibilityby David Carl Shaver.en_US
dc.format.extent233 leavesen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsMIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectElectrical Engineering and Computer Science.en_US
dc.subject.lcshIntegrated circuits Testing.en_US
dc.subject.lcshElectron beams Industrial applications.en_US
dc.subject.lcshIntegrated circuits Large scale integration.en_US
dc.subject.otherIntegrated circuits fasten_US
dc.subject.otherElectron beams fasten_US
dc.subject.otherIntegrated circuits fasten_US
dc.titleElectron beam techniques for testing and restructuring of wafer-scale integrated circuitsen_US
dc.typeThesisen_US
dc.description.degreePh. D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.identifier.oclc08260000en_US
dc.description.collectionPh. D. Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Scienceen_US
dspace.imported2024-05-14T23:17:42Zen_US
mit.thesis.degreeDoctoralen_US


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