| dc.contributor.advisor | Henry I. Smith. | |
| dc.contributor.author | Shaver, David Carl. | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2024-05-14T23:17:42Z | |
| dc.date.available | 2024-05-14T23:17:42Z | |
| dc.date.copyright | 1981 | en_US |
| dc.date.issued | 1981 | en_US |
| dc.identifier.uri | https://hdl.handle.net/1721.1/154969 | |
| dc.description | Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 1981 | en_US |
| dc.description | Includes bibliographical references. | en_US |
| dc.description.statementofresponsibility | by David Carl Shaver. | en_US |
| dc.format.extent | 233 leaves | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.subject.lcsh | Integrated circuits
Testing. | en_US |
| dc.subject.lcsh | Electron beams
Industrial applications. | en_US |
| dc.subject.lcsh | Integrated circuits
Large scale integration. | en_US |
| dc.subject.other | Integrated circuits fast | en_US |
| dc.subject.other | Electron beams fast | en_US |
| dc.subject.other | Integrated circuits fast | en_US |
| dc.title | Electron beam techniques for testing and restructuring of wafer-scale integrated circuits | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph. D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
| dc.identifier.oclc | 08260000 | en_US |
| dc.description.collection | Ph. D. Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science | en_US |
| dspace.imported | 2024-05-14T23:17:42Z | en_US |
| mit.thesis.degree | Doctoral | en_US |
