Non-contact defect detection in silicon

Author(s)
Olyha, Robert Stephen
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Mildred S. Dresselhaus.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.
 
MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING.
 
Bibliography: leaves 132-143.
 
Date issued
1984
URI
http://hdl.handle.net/1721.1/15576
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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