| dc.contributor.advisor | Mildred S. Dresselhaus. | en_US |
| dc.contributor.author | Olyha, Robert Stephen | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2005-08-05T18:27:22Z | |
| dc.date.available | 2005-08-05T18:27:22Z | |
| dc.date.copyright | 1984 | en_US |
| dc.date.issued | 1984 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/15576 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. | en_US |
| dc.description | MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. | en_US |
| dc.description | Bibliography: leaves 132-143. | en_US |
| dc.description.statementofresponsibility | by Robert Stephen Olyha, Jr. | en_US |
| dc.format.extent | 143, [1] leaves | en_US |
| dc.format.extent | 7326260 bytes | |
| dc.format.extent | 7326017 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.title | Non-contact defect detection in silicon | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 11758639 | en_US |
