A heat flow problem in electron beam etching of thin films

Author(s)
Reed, Francis Keith
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Advisor
Ewan W. Fletcher.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959.
 
Includes bibliographical references (leaves 65-67).
 
Date issued
1959
URI
http://hdl.handle.net/1721.1/15821
Department
Massachusetts Institute of Technology. Department of Electrical Engineering; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering
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