| dc.contributor.advisor | Henry I. Smith. | en_US |
| dc.contributor.author | Finlayson, Mark Alan, 1977- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2005-05-19T14:36:52Z | |
| dc.date.available | 2005-05-19T14:36:52Z | |
| dc.date.copyright | 2001 | en_US |
| dc.date.issued | 2001 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/16793 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. | en_US |
| dc.description | Includes bibliographical references (p. 59-61). | en_US |
| dc.description | This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. | en_US |
| dc.description.statementofresponsibility | by Mark Alan Finlayson. | en_US |
| dc.format.extent | 61 p. | en_US |
| dc.format.extent | 1649624 bytes | |
| dc.format.extent | 1649424 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.title | Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 50181446 | en_US |
