Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties
Author(s)
Huguenin, S. Carolene![Thumbnail](/bitstream/handle/1721.1/17389/32031484-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
C.V. Thompson, II.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. Includes bibliographical references (leaves 58-59).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering