Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties

Author(s)
Huguenin, S. Carolene
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Advisor
C.V. Thompson, II.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
 
Includes bibliographical references (leaves 58-59).
 
Date issued
1994
URI
http://hdl.handle.net/1721.1/17389
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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