Metrology of thin silicon expitaxial films : determination of epitaxial film thickness by Fourier-transform infra-red spectrometry

Author(s)
Cherkassky, Alexander (Alexander Peter), 1963-
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
 
Includes bibliographical references (leaf 47).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/17405
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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