Thermal inverse design for resistive micro-heaters
Name
225101_1_5.0235526.pdf
Description
Published version
Size
3.58 MB
Format
Adobe PDF
Checksum (MD5)
fb0b59534611424685d40702ce1d85c2
Author(s)
Dao, Khoi Phuong
Hu, Juejun
Date Issued
December 11, 2024
Journal
Journal of Applied Physics
Publisher
AIP Publishing
Citation
Khoi Phuong Dao, Juejun Hu; Thermal inverse design for resistive micro-heaters. J. Appl. Phys. 14 December 2024; 136 (22): 225101.
Version
Final published version
Abstract
This paper proposes an inverse design scheme for resistive heaters. By adjusting the spatial distribution of a binary electrical resistivity map, the scheme enables objective-driven optimization of heaters to achieve pre-defined steady-state temperature profiles. The approach can be fully automated and is computationally efficient since it does not entail extensive iterative simulations of the entire heater structure. The design scheme offers a powerful solution for resistive heater device engineering in applications spanning electronics, photonics, and microelectromechanical systems.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
Creative Commons Attribution
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1063/5.0235526
