Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas

Author(s)
Liu, Joanne
Thumbnail
DownloadFull printable version (18.74Mb)
Advisor
Herbert H. Sawin.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993.
 
Includes bibliographical references (p. 207-213).
 
Date issued
1993
URI
http://hdl.handle.net/1721.1/31038
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
Collections