Microstructural evolution of epitaxial dielectric films derived from chemical precursors

Author(s)
Ng, Man Fai
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Advisor
Michael J. Cima.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
 
Includes bibliographical references (leaves 138-150).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/32167
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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