| dc.contributor.advisor | Michael J. Cima. | en_US |
| dc.contributor.author | Ng, Man Fai | en_US |
| dc.date.accessioned | 2006-03-29T18:20:59Z | |
| dc.date.available | 2006-03-29T18:20:59Z | |
| dc.date.copyright | 1995 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/32167 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. | en_US |
| dc.description | Includes bibliographical references (leaves 138-150). | en_US |
| dc.description.statementofresponsibility | by Man Fai Ngg. | en_US |
| dc.format.extent | 150 leaves | en_US |
| dc.format.extent | 8698263 bytes | |
| dc.format.extent | 8706548 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Materials Science and Engineering | en_US |
| dc.title | Microstructural evolution of epitaxial dielectric films derived from chemical precursors | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
| dc.identifier.oclc | 33669110 | en_US |
