Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

Author(s)
Rasera, Roy L. (Roy Louis)
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Advisor
Joseph B. Bernstein.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
 
Includes bibliographical references (leaves 104-106).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/32180
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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