Crystallization in self-implanted polycrystalline silicon-on-insulator films

Author(s)
Iverson, Ralph Benhart
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
L. Rafael Reif.
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Description
Bibliography: leaves 118-122.
 
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987.
 
Date issued
1987
URI
http://hdl.handle.net/1721.1/32570
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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