Feasibility study of spatial-phase-locked focused-ion-beam lithography

Author(s)
Yasaka, Anto
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Advisor
Henry I. Smith.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
 
Includes bibliographical references (leaves 66-68).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/32663
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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