Design of a digitally actuated, micro-scale Cartesian nanopositioner

Abstract

The purpose of this research is to generate the design knowledge required to produce a small-scale, low-cost precision positioning device. Accurate motion manipulation on the nanometer level is one of the main challenges facing precision engineers today. With more developed nations' economies being driven in part by the growing telecommunications, photonics, and integrated circuit industries, the need for inexpensive and accurate solutions for precision motion manipulation is clear. Unfortunately, current technology requires costly sensors and feedback control to achieve the necessary accuracy to complete even the simplest precision manipulation tasks. This feedback control can represent up to 50% of the total packaging cost of these systems. These systems could be much more affordable if the feedback and controls could be eliminated from devices such as Cartesian nanopositioners. This thesis presents a novel MEMS Cartesian nanopositioner referred to as DNAT) that is digitally actuated and requires no sensors or feedback (control, yet still provides the accuracy and resolution offered by today's state of the art systems. The modeling, design, and fabrication of this device is covered within this thesis. A prototype was designed and fabricated for use as a proof-of-concept, and a verification of the modeling techniques developed as a result of this research. The result is a conceptual model and design knowledge that may change the way many important fine motion tasks are carried out.