Implementation of a design rule checker for silicon wafer fabrication

Author(s)
Unver, Evren R. (Evren Rifki)
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Advisor
Donald E. Troxel, Michael B. McIlrath.
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Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
 
Includes bibliographical references (leaves 90-92).
 
Date issued
1994
URI
http://hdl.handle.net/1721.1/35387
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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