| dc.contributor.advisor | Donald E. Troxel, Michael B. McIlrath. | en_US |
| dc.contributor.author | Unver, Evren R. (Evren Rifki) | en_US |
| dc.date.accessioned | 2007-01-10T15:59:36Z | |
| dc.date.available | 2007-01-10T15:59:36Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1994 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/35387 | |
| dc.description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. | en_US |
| dc.description | Includes bibliographical references (leaves 90-92). | en_US |
| dc.description.statementofresponsibility | by Evren R. Ünver. | en_US |
| dc.format.extent | 92 leaves | en_US |
| dc.format.extent | 3468903 bytes | |
| dc.format.extent | 3681634 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Implementation of a design rule checker for silicon wafer fabrication | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.Eng. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 31163494 | en_US |
