Browsing Singapore-MIT Alliance (SMA) by Author "Wang, B."
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Fabrication of Two-Dimensional Photonic Crystals in AlGaInP/GaInP Membranes by Inductively Coupled Plasma Etching
Chen, A.; Chua, Soo-Jin; Wang, B.; Fitzgerald, Eugene A. (2006-01)The fabrication process of two-dimensional photonic crystals in an AlGaInP/GaInP multi-quantum-well membrane structure is developed. The process includes high resolution electron-beam lithography, pattern transfer into ... -
Two-dimensional Photonic Crystals Fabricated by Nanoimprint Lithography
Chen, A.; Chua, Soo-Jin; Fonstad, Clifton G. Jr.; Wang, B.; Wilhelmi, O. (2005-01)We report on the process parameters of nanoimprint lithography (NIL) for the fabrication of two-dimensional (2-D) photonic crystals. The nickel mould with 2-D photonic crystal patterns covering the area up to 20mm² is ...