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TiNi-based thin films for MEMS applications
(2004-01)
In this paper, some critical issues and problems in the development of TiNi thin films were discussed, including preparation and characterization considerations, residual stress and adhesion, frequency improvement, fatigue ...
Nanocomposite Thin Films for both Mechanical and Functional Applications
(2004-01)
The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and ...