Advanced Materials for Micro- and Nano-Systems (AMMNS): Recent submissions
Now showing items 91-93 of 122
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Wafer-Level Thermocompression Bonds
(2003-01)Thermocompression bonding of gold is a promising technique for achieving low temperature, wafer-level bonding without the application of an electric field or complicated pre-bond cleaning procedure. The presence of a ductile ... -
TiNi shape memory alloy thin films for microactuator application
(2003-01)TiNi films were prepared by co-sputtering TiNi target and a separate Ti target. Crystalline structure and phase transformation behaviors of TiNi films were investigated. Results showed that TiNi films had fine grain size ... -
Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm
(2003-01)The validity of the dynamic analysis based on simplified plate model was investigated using of FE-codes ANSYS in the present paper. The simplified clamped multi-layered plate model was first verified by comparison with the ...


