| dc.contributor.advisor | Jung-Hoon Chun and Nannaji Saka. | en_US |
| dc.contributor.author | Shieh, Marvin Bryan | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2007-03-12T17:45:46Z | |
| dc.date.available | 2007-03-12T17:45:46Z | |
| dc.date.copyright | 2006 | en_US |
| dc.date.issued | 2006 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/36701 | |
| dc.description | Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006. | en_US |
| dc.description | Includes bibliographical references (leaf 27). | en_US |
| dc.description.abstract | A working prototype face-up CMP tool has successfully been completed. Experiments conducted on the face-up CMP machine qualitatively correspond with the theoretical polishing model. Discrepancies in data from the theoretical model could potentially be caused by non-uniform loading of the polishing pad and uneven distribution of slurry over the pad due to the edge effects on fluid flow. Despite the discrepancies, experimental data suggest that the theoretical model used to describe blanket wafer polishing by the face-up CMP tool is at least partially valid. | en_US |
| dc.description.statementofresponsibility | by Marvin Bryan Shieh. | en_US |
| dc.format.extent | 27 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | Face-up chemical mechanical polishing : kinematics and material removal rate | en_US |
| dc.title.alternative | Face-up CMP : kinematics and material removal rate | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.B. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 77549974 | en_US |
