A laser-assisted microchemistry system for the fabrication of small electromechanical devices

Author(s)
Nassuphis, Nick I
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Advisor
D.J. Ehrlich, A. Slocum.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.
 
Includes bibliographical references (leaves 80-82).
 
Date issued
1994
URI
http://hdl.handle.net/1721.1/36928
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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