A laser-assisted microchemistry system for the fabrication of small electromechanical devices
Author(s)Nassuphis, Nick I
D.J. Ehrlich, A. Slocum.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.Includes bibliographical references (leaves 80-82).
DepartmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering
Massachusetts Institute of Technology