| dc.contributor.advisor | D.J. Ehrlich, A. Slocum. | en_US |
| dc.contributor.author | Nassuphis, Nick I | en_US |
| dc.date.accessioned | 2007-04-03T16:52:22Z | |
| dc.date.available | 2007-04-03T16:52:22Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1994 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/36928 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994. | en_US |
| dc.description | Includes bibliographical references (leaves 80-82). | en_US |
| dc.description.statementofresponsibility | by Nick I. Nassuphis. | en_US |
| dc.format.extent | 82 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | A laser-assisted microchemistry system for the fabrication of small electromechanical devices | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 30822295 | en_US |
