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dc.contributor.advisorD.J. Ehrlich, A. Slocum.en_US
dc.contributor.authorNassuphis, Nick Ien_US
dc.date.accessioned2007-04-03T16:52:22Z
dc.date.available2007-04-03T16:52:22Z
dc.date.copyright1994en_US
dc.date.issued1994en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/36928
dc.descriptionThesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.en_US
dc.descriptionIncludes bibliographical references (leaves 80-82).en_US
dc.description.statementofresponsibilityby Nick I. Nassuphis.en_US
dc.format.extent82 leavesen_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582
dc.subjectMechanical Engineeringen_US
dc.titleA laser-assisted microchemistry system for the fabrication of small electromechanical devicesen_US
dc.typeThesisen_US
dc.description.degreeM.S.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Dept. of Mechanical Engineeringen_US
dc.identifier.oclc30822295en_US


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