Chemical vapor etching of GaAs by CH3I
Author(s)Krueger, Charles Winslow
Maria Flytzani-Stephanopoulos, Robert A. Brown.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.Includes bibliographical references (leaves 174-179).
DepartmentMassachusetts Institute of Technology. Dept. of Chemical Engineering
Massachusetts Institute of Technology