Chemical vapor etching of GaAs by CH3I

Author(s)
Krueger, Charles Winslow
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Advisor
Maria Flytzani-Stephanopoulos, Robert A. Brown.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.
 
Includes bibliographical references (leaves 174-179).
 
Date issued
1994
URI
http://hdl.handle.net/1721.1/37507
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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