| dc.contributor.advisor | Maria Flytzani-Stephanopoulos, Robert A. Brown. | en_US |
| dc.contributor.author | Krueger, Charles Winslow | en_US |
| dc.date.accessioned | 2007-05-16T18:49:04Z | |
| dc.date.available | 2007-05-16T18:49:04Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1994 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/37507 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994. | en_US |
| dc.description | Includes bibliographical references (leaves 174-179). | en_US |
| dc.description.statementofresponsibility | by Charles Winslow Krueger. | en_US |
| dc.format.extent | 181 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Chemical Engineering | en_US |
| dc.title | Chemical vapor etching of GaAs by CH3I | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.identifier.oclc | 30772398 | en_US |
