Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems

Author(s)
Tsao, Che-Chih
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
 
Includes bibliographical references.
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/38039
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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