| dc.contributor.advisor | . | en_US |
| dc.contributor.author | Tsao, Che-Chih | en_US |
| dc.date.accessioned | 2007-07-18T13:27:58Z | |
| dc.date.available | 2007-07-18T13:27:58Z | |
| dc.date.copyright | 1994 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/38039 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. | en_US |
| dc.description | Includes bibliographical references. | en_US |
| dc.description.statementofresponsibility | by Che-Chih Tsao. | en_US |
| dc.format.extent | 1 v. (various pagings) | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 32599890 | en_US |
