Material transport and reaction effects in surface typography evolution during plasma etching

Author(s)
Arnold, John Christopher, 1964-
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Advisor
Herbert H. Sawin.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.
 
Includes bibliographical references (leaves 318-324).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/38041
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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