| dc.contributor.advisor | Herbert H. Sawin. | en_US |
| dc.contributor.author | Arnold, John Christopher, 1964- | en_US |
| dc.date.accessioned | 2007-07-18T13:28:16Z | |
| dc.date.available | 2007-07-18T13:28:16Z | |
| dc.date.copyright | 1995 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/38041 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995. | en_US |
| dc.description | Includes bibliographical references (leaves 318-324). | en_US |
| dc.description.statementofresponsibility | by John Christopher Arnold. | en_US |
| dc.format.extent | 383 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Chemical Engineering | en_US |
| dc.title | Material transport and reaction effects in surface typography evolution during plasma etching | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.identifier.oclc | 32601668 | en_US |
