Deposition and planarization of epitaxial oxide thin films for high temperature superconducting device applications

Author(s)
Chang, Bertha Pi-Ju
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Advisor
Michel J. Cima.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
 
Includes bibliographical references (leaves 265-274).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/38087
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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