Nanocomposite Thin Films for both Mechanical and Functional Applications

dc.contributor.author	Zhang, Sam
dc.contributor.author	Fu, Yongqing
dc.contributor.author	Du, Hejun
dc.contributor.author	Liu, Yang
dc.contributor.author	Chen, Tupei
dc.date.accessioned	2003-12-13T17:28:56Z
dc.date.available	2003-12-13T17:28:56Z
dc.date.issued	2004-01
dc.identifier.uri	http://hdl.handle.net/1721.1/3836
dc.description.abstract	The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity.	en
dc.description.sponsorship	Singapore-MIT Alliance (SMA)	en
dc.format.extent	379704 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.relation.ispartofseries	Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject	nanocomposite	en
dc.subject	films	en
dc.subject	superhardness	en
dc.subject	toughness	en
dc.subject	photoluminescence	en
dc.subject	optical	en
dc.title	Nanocomposite Thin Films for both Mechanical and Functional Applications	en
dc.type	Article	en