Analysis of a diamond CVD process using computer simulation
Author(s)
Nagai, Masaki![Thumbnail](/bitstream/handle/1721.1/38416/36152102-MIT.pdf.jpg?sequence=4&isAllowed=y)
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Alternative title
Analysis of a diamond chemical vapor deposition process using computer simulation.
Advisor
David K. Roylance.
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Metadata
Show full item recordDescription
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. Includes bibliographical references (leaves 98-100).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering