dc.contributor.advisor | David K. Roylance. | en_US |
dc.contributor.author | Nagai, Masaki | en_US |
dc.date.accessioned | 2007-08-03T18:41:04Z | |
dc.date.available | 2007-08-03T18:41:04Z | |
dc.date.copyright | 1996 | en_US |
dc.date.issued | 1996 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/38416 | |
dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. | en_US |
dc.description | Includes bibliographical references (leaves 98-100). | en_US |
dc.description.statementofresponsibility | by Masaki Nagai. | en_US |
dc.format.extent | 114 leaves | en_US |
dc.language.iso | eng | en_US |
dc.publisher | Massachusetts Institute of Technology | en_US |
dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
dc.subject | Materials Science and Engineering | en_US |
dc.title | Analysis of a diamond CVD process using computer simulation | en_US |
dc.title.alternative | Analysis of a diamond chemical vapor deposition process using computer simulation. | en_US |
dc.type | Thesis | en_US |
dc.description.degree | M.S. | en_US |
dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
dc.identifier.oclc | 36152102 | en_US |