Alternative chemistries for etching of silicon dioxide and silicon nitride

Author(s)
Karecki, Simon Martin
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Advisor
L. Rafael Reif.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
 
Includes bibliographical references (p. 123-126).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/43304
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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