| dc.contributor.advisor | L. Rafael Reif. | en_US |
| dc.contributor.author | Karecki, Simon Martin | en_US |
| dc.date.accessioned | 2008-11-07T19:26:37Z | |
| dc.date.available | 2008-11-07T19:26:37Z | |
| dc.date.copyright | 1996 | en_US |
| dc.date.issued | 1997 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/43304 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. | en_US |
| dc.description | Includes bibliographical references (p. 123-126). | en_US |
| dc.description.statementofresponsibility | by Simon Martin Karecki. | en_US |
| dc.format.extent | 167 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Alternative chemistries for etching of silicon dioxide and silicon nitride | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 36962410 | en_US |
