Hyperthermal molecular beam dry etching of III-V compound semiconductors

Author(s)
Hoshino, Isako.
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Advisor
Clifton G. Fonstad, Jr.
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Description
Includes bibliographical references (p. 181-186).
 
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
 
Vita.
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/43365
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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