| dc.contributor.advisor | Alexander Slocum. | en_US |
| dc.contributor.author | Alden, John C. (John Christopher) | en_US |
| dc.date.accessioned | 2009-06-30T17:09:24Z | |
| dc.date.available | 2009-06-30T17:09:24Z | |
| dc.date.issued | 1997 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/46052 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. | en_US |
| dc.description | Includes bibliographical references (p. 100). | en_US |
| dc.description.statementofresponsibility | by John C. Alden. | en_US |
| dc.format.extent | 100 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering | en_US |
| dc.title | The development and characterization of kinematic interfaces for the semiconductor industry | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 37160040 | en_US |
