Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)

Author(s)
Nayfeh, Hasan M. (Hasan Munir), 1974-
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Alternative title
Correlation of silicon microroughness on electrical parameters of SOI-AS (silicon-on-insulator with active substrate)
Advisor
Dimitri A. Antoniadis.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
 
Includes bibliographical references (leaves 83-86).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/47504
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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