Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes
Author(s)
Banerjee, Suman K. (Suman Kumar), 1972-
DownloadFull printable version (37.82Mb)
Advisor
Klavs F. Jensen.
Terms of use
Metadata
Show full item recordDescription
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. Includes bibliographical references.
Date issued
1998Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering