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Nonlinear model reduction methods for rapid thermal and chemical vapor deposition processes

dc.contributor.advisorKlavs F. Jensen.en_US
dc.contributor.authorBanerjee, Suman K. (Suman Kumar), 1972-en_US
dc.date.accessioned2009-11-06T16:13:01Z
dc.date.available2009-11-06T16:13:01Z
dc.date.copyright1998en_US
dc.date.issued1998en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/49640
dc.descriptionThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.en_US
dc.descriptionIncludes bibliographical references.en_US
dc.description.statementofresponsibilityby Suman K. Banerjee.en_US
dc.format.extent186 leavesen_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectChemical Engineeringen_US
dc.titleNonlinear model reduction methods for rapid thermal and chemical vapor deposition processesen_US
dc.typeThesisen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Chemical Engineering
dc.identifier.oclc40073590en_US


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