| dc.contributor.advisor | Henry I. Smith, Carl V. Thompson. | en_US |
| dc.contributor.author | Atwater, Harry A. (Harry Albert), 1960- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2009-12-10T18:43:29Z | |
| dc.date.available | 2009-12-10T18:43:29Z | |
| dc.date.issued | 1987 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/49890 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987. | en_US |
| dc.description | Bibliography: leaves 213-224. | en_US |
| dc.description.statementofresponsibility | by Harry Albert Atwater, Jr. | en_US |
| dc.format.extent | 224 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.title | Ion beam enhanced grain growth in thin films | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 17736099 | en_US |
