Study of plasma-surface kinetics and simulation of feature profile evolution in chlorine etching of patterened polysilicon
Author(s)
Chang, Jane Pei-chen, 1967-
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Advisor
Herbert H. Sawin.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. Includes bibliographical references (p. 163-170).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering