| dc.contributor.advisor | Herbert H. Sawin. | en_US |
| dc.contributor.author | Chang, Jane Pei-chen, 1967- | en_US |
| dc.date.accessioned | 2010-01-07T20:30:27Z | |
| dc.date.available | 2010-01-07T20:30:27Z | |
| dc.date.copyright | 1998 | en_US |
| dc.date.issued | 1998 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/50356 | |
| dc.description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998. | en_US |
| dc.description | Includes bibliographical references (p. 163-170). | en_US |
| dc.description.statementofresponsibility | by Jane Pei-chen Chang. | en_US |
| dc.format.extent | 218 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Chemical Engineering | en_US |
| dc.title | Study of plasma-surface kinetics and simulation of feature profile evolution in chlorine etching of patterened polysilicon | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | Ph.D. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Chemical Engineering | |
| dc.identifier.oclc | 39171343 | en_US |
