Submicron Structure Fabrication and Research

Author(s)
Melngailis, John; Smith, Henry I.; Hawryluk, Andrew M.; Dana, Stephane S.; Bezdjian, Krikor A.; ... Show more
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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Description
Contains reports on six research projects.
Date issued
1981-01
URI
http://hdl.handle.net/1721.1/56806
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_123_XIX
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 123
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