Focused Ion Beam Fabrication

Author(s)
Lezec, Henri J.; Shepard, Mark I.; Melngailis, John; Mahoney, Leonard J.; Musil, Christian R.; ... Show more
Thumbnail
DownloadRLE_PR_130_03.pdf (276.4Kb)
Terms of use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
Metadata
Show full item record
Description
Contains reports on four sections of one research project.
Date issued
1987-01-01
URI
http://hdl.handle.net/1721.1/57025
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_130_03
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130
Collections