| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Shepard, Mark I. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Ismail, Khalid | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Herndon, Terry O. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Blauner, Patricia G. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.date.accessioned | 2010-07-16T03:46:13Z | |
| dc.date.available | 2010-07-16T03:46:13Z | |
| dc.date.issued | 1987-01-01 to 1987-12-31 | en_US |
| dc.identifier | RLE_PR_130_03 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57025 | |
| dc.description | Contains reports on four sections of one research project. | en_US |
| dc.description.sponsorship | Microsystems Technology Laboratories | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/Naval Electronics Systems Command (Contract MDA 903-85-C-0215) | en_US |
| dc.description.sponsorship | U.S. Air Force (through Lincoln Laboratory) | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency (through Lincoln Laboratory) | en_US |
| dc.description.sponsorship | Charles Stark Draper Laboratory, Inc. (Contract DL-H-261827) | en_US |
| dc.description.sponsorship | Hitachi Central Research Laboratory | en_US |
| dc.description.sponsorship | Nippon Telegraph & Telephone | en_US |
| dc.description.sponsorship | U.S. Army Research Office (Contract DAALO3-87-K-0126) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987 | en_US |
| dc.relation.ispartof | Focused Ion Beam Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Fabrication | en_US |
| dc.subject.other | Focused Ion Beam Program | en_US |
| dc.title | Focused Ion Beam Fabrication | en_US |
| dc.type | Technical Report | en_US |
