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Nanostructures Technology, Research, and Applications

dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorSilverman, Scott E.en_US
dc.contributor.authorFerrera, Juanen_US
dc.contributor.authorCarter, James M.en_US
dc.contributor.authorWong, Vincent V.en_US
dc.contributor.authorGupta, Nitinen_US
dc.contributor.authorHector, Scott D.en_US
dc.contributor.authorOwen, Gabrielle M.en_US
dc.contributor.authorSchattenburg, Mark L.en_US
dc.contributor.authorYang, Isabel Y.en_US
dc.contributor.authorBurkhardt, Martinen_US
dc.contributor.authorLi, Huiyingen_US
dc.contributor.authorMondol, Mark K.en_US
dc.contributor.authorSission, Robert D.en_US
dc.contributor.authorMoon, Euclid E.en_US
dc.contributor.authorAucoin, Richard J.en_US
dc.contributor.authorShah, Satyen N.en_US
dc.contributor.authorYasaka, Antoen_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorChu, Williamen_US
dc.contributor.authorHu, Hangen_US
dc.contributor.authorRhee, Keeen_US
dc.contributor.authorSu, Lisa T-F.en_US
dc.contributor.authorCarter, David J.en_US
dc.contributor.authorKumar, Arvinden_US
dc.contributor.authorMelloch, Michael R.en_US
dc.contributor.authorOrlando, Terry P.en_US
dc.contributor.authordel Alamo, Jesúsen_US
dc.contributor.authorEugster, Cristopher C.en_US
dc.contributor.authorHugunin, James J.en_US
dc.contributor.authorDamask, Jay N.en_US
dc.contributor.authorHaus, Hermann A.en_US
dc.contributor.authorKolodziejski, Leslie A.en_US
dc.contributor.authorChoi, Woo-Youngen_US
dc.contributor.authorFonstad, Clifton G., Jr.en_US
dc.contributor.authorMoolji, Akbar A.en_US
dc.contributor.authorLew, Julie C.en_US
dc.contributor.authorPorter, Jeanne M.en_US
dc.contributor.authorCanizares, Claude R.en_US
dc.contributor.authorFleming, Robert C., Jr.en_US
dc.contributor.authorDonovan, Sean M.en_US
dc.contributor.authorIsmail, Khaliden_US
dc.contributor.authorThompson, Carl V.en_US
dc.date.accessioned2010-07-16T19:26:31Z
dc.date.available2010-07-16T19:26:31Z
dc.date.issued1993-01-01 to 1993-12-31en_US
dc.identifierRLE_PR_136_01_02s_04en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/57269
dc.descriptionContains reports on twenty research projects and a list of publications.en_US
dc.description.sponsorshipJoint Services Electronics Program Contract DAAL03-92-C-0001en_US
dc.description.sponsorshipSemiconductor Research Corporation Contract 94-MJ-550en_US
dc.description.sponsorshipU.S. Army Research Office Grant DAAL03-92-G-0291en_US
dc.description.sponsorshipAdvanced Research Projects Agency/Naval Air Systems Command Contract N00019-92-K-0021en_US
dc.description.sponsorshipNational Science Foundation Grant ECS 90-16437en_US
dc.description.sponsorshipNational Science Foundation Grant ECS 90-16737en_US
dc.description.sponsorshipIBM Corporation Contract 1622en_US
dc.description.sponsorshipU.S. Air Force - Office of Scientific Research Grant F-49-62-92-J-0064en_US
dc.description.sponsorshipNational Science Foundation Grant DMR 87-19217en_US
dc.description.sponsorshipNational Science Foundation Grant DMR 90-22933en_US
dc.description.sponsorshipNational Aeronautics and Space Administration Contract NAS8-36748en_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1993en_US
dc.relation.ispartofSolid State Physics, Electronics and Opticsen_US
dc.relation.ispartofQuantum-Effect Devicesen_US
dc.relation.ispartofNanostructures Technology, Research, and Applicationsen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 136en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherNanostructures Technologyen_US
dc.subject.otherNanostructures Researchen_US
dc.subject.otherNanostructures Applicationsen_US
dc.subject.otherNanoStructures Laboratoryen_US
dc.subject.otherScanning Electron-Beam Lithography Facilityen_US
dc.subject.otherSpatial-Phase-Locked Electron-Beam Lithographyen_US
dc.subject.otherX-Ray Nanolithographyen_US
dc.subject.otherImproved Mask Technology for X-Ray Lithographyen_US
dc.subject.otherHigh Precision Mask Alignment Systemen_US
dc.subject.otherOptimization of Synchrotron-Based X-ray Lithographyen_US
dc.subject.otherAchromatic Holographic Lithographyen_US
dc.subject.otherIon Beam Lithographyen_US
dc.subject.otherHigh Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithographyen_US
dc.subject.otherFabrication of T-gate Devices Using X-ray Lithographyen_US
dc.subject.otherCoulomb Charging Effects in Semiconductor Nanostructuresen_US
dc.subject.otherCoulomb Charging Tunneling in Semiconductor Nanostructuresen_US
dc.subject.otherDual Electron Waveguide Device Fabricated Using X-ray Lithographyen_US
dc.subject.otherNovel Mesoscopic Superconducting Devicesen_US
dc.subject.otherChannel-Dropping Filters Fabricated Using X-ray Lithographyen_US
dc.subject.otherRidge-Grating Distributed-Feedback Lasers Fabricated by X-ray Lithographyen_US
dc.subject.otherFabrication of Sub-micron MSM Photodiodes by X-ray Lithographyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for X-ray Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for X-ray Interferometryen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for Atom-Beam Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Transmission Gratings for Atom-Beam Interferometryen_US
dc.subject.otherHigh-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopyen_US
dc.subject.otherGaAs Epitaxy on Sawtooth-Patterned Siliconen_US
dc.titleNanostructures Technology, Research, and Applicationsen_US
dc.typeTechnical Reporten_US


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