Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes

Author(s)
Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology
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Alternative title
Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film lead zirconate titanate fabrication processes
Other Contributors
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor
Jung-Hoon Chun.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
 
Cataloged from PDF version of thesis.
 
Includes bibliographical references (p. 80).
 
Date issued
2012
URI
http://hdl.handle.net/1721.1/78187
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.
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