Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes
Author(s)
Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology![Thumbnail](/bitstream/handle/1721.1/78187/830026900-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Alternative title
Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film lead zirconate titanate fabrication processes
Other Contributors
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor
Jung-Hoon Chun.
Terms of use
Metadata
Show full item recordDescription
Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. Cataloged from PDF version of thesis. Includes bibliographical references (p. 80).
Date issued
2012Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.