| dc.contributor.advisor | Jung-Hoon Chun. | en_US |
| dc.contributor.author | Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Dept. of Mechanical Engineering. | en_US |
| dc.date.accessioned | 2013-03-28T18:12:37Z | |
| dc.date.available | 2013-03-28T18:12:37Z | |
| dc.date.copyright | 2012 | en_US |
| dc.date.issued | 2012 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/78187 | |
| dc.description | Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. | en_US |
| dc.description | Cataloged from PDF version of thesis. | en_US |
| dc.description | Includes bibliographical references (p. 80). | en_US |
| dc.description.statementofresponsibility | by Jun Bum Lee. | en_US |
| dc.format.extent | 80 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Mechanical Engineering. | en_US |
| dc.title | Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes | en_US |
| dc.title.alternative | Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film lead zirconate titanate fabrication processes | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.Eng.in Manufacturing | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.identifier.oclc | 830026900 | en_US |
