Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process

Author(s)
Nishimoto, Angie Shizue, 1977-
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Alternative title
Assessment of an infrared camera for use as a control sensor for the CMP
Assessment of an infrared sensor for control of chemical mechanical planarization
Advisor
Duane S. Boning.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
 
Includes bibliographical references (leaf 40).
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/80107
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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