Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process
Author(s)Nishimoto, Angie Shizue, 1977-
Assessment of an infrared camera for use as a control sensor for the CMP
Assessment of an infrared sensor for control of chemical mechanical planarization
Duane S. Boning.
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Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.Includes bibliographical references (leaf 40).
DepartmentMassachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science
Massachusetts Institute of Technology
Electrical Engineering and Computer Science